器件仿真控制语言如下：
# (c) Silvaco Inc.,
go atlas
TITLE polysilicon TFT simulation
mesh nx=104 ny=55
#
x.mn=1 l=0r=1
x.mn=104 l=16 r=1
#
#
y.mn=1 l=-0.12 r=1
y.mn=24 l=0 r=1
y.mn=50 l=0.0450 r=1
y.mn=55 l=0.6 r=1.6
#
#
# **************** regions *******************************
# 1=oxide 2=silicon 3-oxide
#
region num=1 y.min=-0.12 y.max=-0.08 nitride
region num=2 y.min=-0.08 y.max=0. oxide
region num=3 y.min=0. y.max=0.0450 silicon
region num=4 y.min=0.0450 y.max=0.6 oxide
#
# **************** electrodes ****************************
# 1=gate 2=substrate 3=source 4=drain
#
elec num=1 x.min=3.5 x.max=5.5 y.min=-0.12 y.max=-0.12 name=gate
elec num=2 x.min=10.5 x.max=12.5 y.min=-0.12 y.max=-0.12 name=gate
elec num=3 substratename=substrate
elec num=4 x.min=0. x.max=2 y.min=0. y.max=0. name=source
elec num=5 x.min=14 x.max=16 y.min=0. y.max=0. name=drain
#
# **************** doping profiles ***********************
#
doping reg=3 uniform conc=1.e10 n.type
doping reg=3 gauss conc=9.e21 n.type x.min=0. x.max=2 char=0.3
doping reg=3 gauss conc=1.8e18 n.type x.min=2 x.max=3.5 char=0.3
doping reg=3 gauss conc=1.8e18 n.type x.min=5.5 x.max=7 char=0.3
doping reg=3 gauss conc=9.e21 n.type x.min=7. x.max=9 char=0.3
doping reg=3 gauss conc=1.8e18 n.type x.min=9 x.max=10.5 char=0.3
doping reg=3 gauss conc=1.8e18 n.type x.min=12.5 x.max=14 char=0.3
doping reg=3 gauss conc=9.e21 n.type x.min=14 x.max=16 char=0.3
#
#
# Set parameters for polysilicon
#
material region=3 mun=300 mup=30
#
# Use the continuous defect model
defects continuous numa=24 numd=24 \
nta=7.3e20 ntd=8.5e20 wta=0.047 wtd=0.03 \
nga=2.4829e17 ngd=3.5e17 ega=0.7 egd=0.3 wga=0.125 wgd=0.12 \
sigtae=1.e-16 sigtah=1.e-14 sigtde=1.e-14 sigtdh=1.e-16 \
siggae=1.e-16 siggah=1.e-14 siggde=1.e-14 siggdh=1.e-16
#
contact num=1 n.polysilicon
contact name=source
contact name=drain
models srh temp=300
models print bbt.kl bb.b=1.05e7
#
output con.band val.band
method newton
solve init
save outf=sim.str
tonyplot sim.str -set tftex07_0.set
#
# Electrode #1 - Gate, #2 - Substrate, #3 - Source, #4 - Drain
#
method newton trap maxtrap=10
#
solve vdrain=0.1
solve vdrain=0.2
solve vdrain=0.5
solve vdrain=1 vstep=0.01 vfinal=10. name=drain
#
# Solve id versus vg curve
#
#
log outf=sim_10v.log
solve vstep=0.1 vfinal=15 name=gate vgate=-15 vdrain=10
solve vgate=-0.1
solve vgate=-0.2
solve vgate=-0.5
solve vgate=-1 vstep=-1 vfinal=-15. name=gate
log outf=sim_0.1v.log
solve vstep=0.1 vfinal=15 name=gate vgate=-15 vdrain=0.1
#tonyplot -overlay tftex07_1.log tftex07_2.log -set tftex07_1.set
tonyplot -overlay sim_10v.log sim_0.1v.log -set tftex07_2.set
extract init inf ="sim_10v.log"
extract name = "IOFF" y.val from curve (v."gate",i."drain") where x.val =-7
extract name = "ION" y.val from curve (v."gate",i."drain") where x.val =8
#
quit
